集成电路工艺：Deep-submicron process technology Describe such deep-submicron process technology and intended to provide semiconductor engineers and researchers with a comprehensive , state-of-the-art reference about these emerging and leading-edge process.

硅基集成电路工艺：process technology provide a comprehensive and up-to-date treatment of this important and rapidly changing field.

集成电路工艺：The Submicron MOSFET An understanding of device physics has become even more important that MOSFETs have crossed the long-channnel frontier into the submicron realm.