We demonstrate the possibility of post-fabrication trimming of the response of nitrogen-rich silicon nitride racetrack resonators by using an ultraviolet laser. The results revealed the possibility to efficiently tune the operating wavelength of fabricated racetrack resonators to any point within the full free spectral range. This process is much faster than similar, previously presented methods (in the order of seconds, compared to hours). This technique can also be applied to accurately trim t

一种针对NVM芯片参数Trimming流程的 优化，袁翔，郭筝，随着半导体技术的不断发展，大规模乃至超大规模集成电路都已经得到了普遍应用。但在芯片设计、生产、测试及封装的过程中，各种形