六、MOSFET工艺仿真 （1） 调用ATHENA仿真器并生成网格信息 go athena line x loc=0.0 spac=0.1 line x loc=0.2 spac=0.006 line x loc=0.4 spac=0.006 line x loc=0.6 spac=0.01 line y loc=0.0 spac=0.002 line y loc=0.2 spac=0.005 line y loc=0.5 spac=0.05 line y loc=0.8 spac=0.15

TSUPREM-4基本命令介绍， 半导体工艺仿真工具TSUPREM-4(23)中文教程。

第二讲-Silvaco-TCAD-工艺仿真

TSUPREM-4 is a computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices. TSUPREM-4 simulates the incorporation and redistribution of impurities in a two-dimensional (2-D) device cross-section perpendicular to the surface of the silicon wafer. The output information provided by the program includes: • Boundaries of the various layers of materials in the structure • Distribution of impurities within each layer • Stresses produced by oxidation, thermal cycling, or film deposition

Intellisuite安装包

abaqus焊接工艺仿真插件，可以模拟激光焊、氩弧焊、搅拌摩擦焊等多种焊接工艺及多遍焊接过程，操作简单，附带帮助文档