超大规模集成电路制造工艺课件

[{"title":"（ 10 个子文件 12.36MB ） 超大规模集成电路制造工艺课件","children":[{"title":"01 集成电路制造工艺概述.pptx <span style='color:#111;'> 852.52KB </span>","children":null,"spread":false},{"title":"10 离子注入.pptx <span style='color:#111;'> 911.37KB </span>","children":null,"spread":false},{"title":"05 金属化.pptx <span style='color:#111;'> 2.16MB </span>","children":null,"spread":false},{"title":"08 刻蚀.pptx <span style='color:#111;'> 2.03MB </span>","children":null,"spread":false},{"title":"02 晶圆制备.pptx <span style='color:#111;'> 1.24MB </span>","children":null,"spread":false},{"title":"09 _.pptx <span style='color:#111;'> 86.76KB </span>","children":null,"spread":false},{"title":"06 平坦化.pptx <span style='color:#111;'> 1.85MB </span>","children":null,"spread":false},{"title":"04 淀积.pptx <span style='color:#111;'> 1.68MB </span>","children":null,"spread":false},{"title":"03 氧化.pptx <span style='color:#111;'> 841.32KB </span>","children":null,"spread":false},{"title":"07 光刻.pptx <span style='color:#111;'> 3.50MB </span>","children":null,"spread":false}],"spread":true}]