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silvaco atlas英文原版用户手册。适合silvaco器件仿真

silvaco软件可以仿真半导体工艺和器件特性，其用户手册内含athena、atlals、deckbuild、devedit等众多模块。

silvaco用户手册，希望能帮到大家，有需要的可以下载，也可以问我要，英文版的，虽然学起来会有点吃力。

半导体工艺和器件仿真工具__Silvaco_TCAD_实用教程.pdf