[{"title":"( 3 个子文件 594KB ) 声表面波(SAW)器件的COMSOL仿真建模、掩膜板绘制及工艺流程设计","children":[{"title":"声表面波(SAW)谐振器与滤波器器件:基于COMSOL有限元仿真软件的相关仿真模型与建模、掩膜板绘制.docx <span style='color:#111;'> 37.29KB </span>","children":null,"spread":false},{"title":"基于COMSOL仿真的声表面波(SAW)谐振器与滤波器器件建模、掩膜板绘制及工艺流程设计指南.html <span style='color:#111;'> 1.45MB </span>","children":null,"spread":false},{"title":"声表面波(SAW)器件的COMSOL仿真建模、掩膜板绘制及工艺流程设计.pdf <span style='color:#111;'> 133.12KB </span>","children":null,"spread":false}],"spread":true}]