The instruction manual for this product comprises the following five volumes; SYSTEM
SECTION, OPERATING SECTION, WINDOW SECTION, ERROR MESSAGE SECTION,
and MEASUREMENT/IMAGE FILE CONFIGURATION. This volume is the OPERATING
SECTION for the CD Measurement and Evaluation SEM System.
• The SYSTEM SECTION covers the installation requirements, arrangements of
component parts of the instrument, functional features, operating principles, file
organization, coordinate schemes, start/stop of instrument operation, troubleshooting,
maintenance, safety precautions, etc.
• The OPERATING SECTION presents the instrument operating procedures, file creating
procedures, and optional function control procedures.
• The WINDOW SECTION details the operational functions and procedures for windows
displayed on the monitor.
• The ERROR MESSAGE SECTION describes possible causes of error messages to be
indicated on the workstation during operation of the instrument, together with remedial
procedures to be taken.
• The MEASUREMENT/IMAGE FILE CONFIGURATION explains the configuration of
image and measurement files.
• Before attempting operation of the instrument, read the SYSTEM SECTION first.
Then, after you have acquired a basic knowledge concerning the instrument, proceed to
the OPERATING SECTION and WINDOW SECTION.
• The maintenance and checkup procedures for ensuring normal operation of the
instrument are described in the SYSTEM SECTION. According to the periodic check list
contained in the SYSTEM SECTION, carry out maintenance and inspection periodically
as instructed.
• This instruction manual contains some descriptions concerning plural instrument models,
software versions and optional functions. Check your instrument model, software
version and optional functions incorporated, and then read the relevant descriptions in the
manual.
• This instruction manual pertains to the following models of the S-9000 series CD SEMs;
S-9200, S-9220, S-9260, S-9260A, S-9300,
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