4.4 三维仿真 170 只有将网格定义得精细才能得到较可信的效果。网格定义是一方面，读者也可以尝试将例子 中的工艺步骤增多会有怎样的影响，例如分成多次氧化，保持总的氧化时间为 30 分钟不变。 对例 4-6 将氧化分成 30 次，每次 1 分钟（即 30×1min）时提取得到氧化层为 405.658 Å，而 3×10min 时为 407.2 Å，1×30min 时是 407.279 Å。如果 y=0 处的网格间距定义为 0.01 微米， 则这三种氧化方式得到氧化层厚度将分别是 414.722、430.49 和 447.672 Å，差异将增大。这 也可以说明每一步都是和设定的方程有误差的（很可能是由于网格的精细程度不同而造成 的），如果步骤太细，太多，则误差积累、放大得也会很厉害，作者建议在看连续步骤的效 果时，可以每一个节点的数据都从最开始进行计算。 其他工艺模型参数读者可以在 X:\sedatools\lib\Athena\.R\common 的 athenamod 文件中寻找，然后结合手册的说明去校准模型参数。另外在 implant-tables 文件夹 里含有离子注入下的模型参数，在 models 文件夹里含有一些硼、磷和砷的扩散、分凝和固 容度的模型参数。 Silvaco 的器件仿真是基于一系列物理模型的，对应相应的模型方程。方程的某些参数 可以在 material 状态里设置，结合模型选择、计算方法选择和 C 解释器自定义表达式可以灵 活地仿真，所以对于器件仿真部分没有提到专门的参数校准。 4.4 三维仿真 ATLAS 可以仿真三维器件，三维器件的结构（三维结构需要用 Tonyplot3D 进行显示。） 可以是由 DevEdit3D 编辑也可以用 ATLAS 描述，但这两种方式描述沿 Z 轴方向的变化都不 是很方便，而采用 Victory（三维仿真器）则是严格意义上的三维仿真。 Victory 有 VictoryCell（元件级的三维工艺仿真器）、VictoryProcess（混杂的三维工艺仿 真器）、VictoryStress（三维应力仿真器）和 VictoryDevice（三维器件仿真器）。本书只介绍 VictoryCell，VictoryStress、VictoryProcess 和 VictoryDevice 部分读者可查阅相关手册。 4.4.1 ATLAS3D 三维器件仿真可以用 Victory，也可由 ATLAS 完成。 ATLAS 中三维器件仿真的主要模块有：  DEVICE3D：硅化合物材料和异质结仿真；  GIGA3D：不等温仿真；  MIXEDMODE3D：器件--电路混合仿真；  TFT3D：TFT 仿真；  QUANTUM3D：量子效应仿真；  LUMINOUS3D：光探测器仿真。 仿真之前需定义结构。有 3 种方法可以得到三维结构。

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It continues to surprise that the subject of Electrical and Electronic Engineering does not draw more young people into the profession, either at Technician or Graduate Engineer level. It is rewarding, both financially and intellectually, whatever the particular role chosen. There are exciting roles for every personality, both for men and women, in manufacturing, produc- tion, design, R&D, teaching, management...the list is long; and there are opportunities for travel. Above all perhaps, it is a profession that provides service to the community, whether through the technology of a washing machine, a mobile phone, a laptop, satellite communications, the electrical power system, new renewable generating equipment, electric vehicles both on and off rails...that list is even longer. Engineers are the driving force that brings ideas from the drawing board to the marketplace. A widely publicized fact is the decline in uptake of science, technology, engineering and mathematics (STEM) subjects in schools and colleges. Yet businesses regularly report a shortage of young people with STEM skills. How can a modern technological economy thrive without them? Why might this be the case? A recent survey by the Institution of Engineering and Technology suggests a number of issues: •A lack of relevant subject material in the curriculum. •STEM subjects are viewed as hard so that, in an environment where there is an emphasis on getting good grades, there is a perceived difficulty in getting a good grade in STEM. •The learning process is passive with less and less time spent on practical work. •Perceptions about success in STEM are negative, the technologically adept being seen as ‘nerds’. This extends into careers such that students don’t perceive STEM subjects as a passport to lucrative and interesting jobs. An added concern is the lack of women in the profession, the result, perhaps, of outdated views of engineering. We hope then that the subject material of this the eleventh edition of Hughes will help you extend your own knowledge of STEM subjects, and that you will be encouraged to pursue a career in Electrical and Electronic Engineering. When studying gets hard, as it invariably does, remember the huge range of exciting opportunities within the profession and that there is a well-documented and continuing shortage of Technician and Graduate engineers. We might claim that this is the fiftieth birthday edition of Hughes, the preface to the first edition having been written in April 1959. It is an honour to be editors of the book, earlier editions of which illuminated our own xviii PREFACE TO THE ELEVENTH EDITION undergraduate studies, as it passes this landmark. Once again, we acknowl- edge the support of our families during the course of preparation of this new edition, which is dedicated to our respective wives, Wendy and Judy. John Hiley Keith Brown Heriot Watt University, Edinburgh August 2011