TSUPREM-4基本命令介绍， 半导体工艺仿真工具TSUPREM-4(23)中文教程。

TSUPREM-4 is a computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices. TSUPREM-4 simulates the incorporation and redistribution of impurities in a two-dimensional (2-D) device cross-section perpendicular to the surface of the silicon wafer. The output information provided by the program includes: • Boundaries of the various layers of materials in the structure • Distribution of impurities within each layer • Stresses produced by oxidation, thermal cycling, or film deposition