SEMI E30-1103 GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM)
SEMI E30.1-0200 INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM)
SEMI E30.5-0302 SPECIFICATION FOR METROLOGY SPECIFIC EQUIPMENT MODEL
SEMI E090標準規範,是半導體最重點的規範,全部半導體都畢需尊守此規範
Abstract
This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 17, 2018. Available at www.semiviews.org and www.semi.or