利用ANSYS软件对压电陶瓷径向振动进行分析,分析发现15 mm×2 mm的压电陶瓷在20~95 k Hz内存在1个76.615 k Hz的最佳共振频率,不仅如此,研究还发现无论压电陶瓷厚径比t≥1还是t≤1,压电陶瓷归一化共振频率均在逐渐减小。通过对15 mm×2 mm压电陶瓷试验、理论计算和ANSYS仿真结果对比,证明了ANSYS软件在解决压电陶瓷径向振动共振频率的准确性和有效性。
The displacement linearity of scanning piezoelectric ceramics can be measured by scanning interference method with a He-Ne laser and a high voltage ramp generator. The results of two typical piezoelectric ceramics are given.