微系统近年来迅速发展，本书对MEMS技术的基础进行了深入的观察，介绍了微系统工程的发展，市场，产品，微系统所涉及的各工程学科的基础知识、尺度效应、微系统工程的材料、微制造和微加工工艺及微系统的设计

UKF姿态估计算法。同时，另有十种论文中常见姿态估计方法如：EKF姿态估计、、Madgwick算法、Mahony算法、PX4姿态估计、四元数、扩展信息滤波、tride、DCM等等 有数据，有参考文献

分析获取的干涉图，熟练掌握MATLAB的操作，了解还原表面形貌的基本算法，编写适合的算法仿真出微结构表面形貌。 技术要求： （1）会分析所获取的微结构表面形貌干涉图； （2）熟练掌握MATLAB的操作； （3）熟悉处理干涉图的相应算法； （4）仿真出微结构的表面形貌。

对IMU基础知识进行讲解，并对误差分析，对IMU的标定技术进行实验分析

微机电系统基础 Foundation of MEMS 微机电系统基础 Foundation of MEMS 微机电系统基础 Foundation of MEMS 微机电系统基础 Foundation of MEMS 微机电系统基础 Foundation of MEMS 微机电系统基础 Foundation of MEMS 微机电系统基础 Foundation of MEMS

基于MEMS传感器的步态检测代码，用matlab仿真实现，大家可以参考！

针对 MEMS 陀螺仪精度不高、随机噪声复杂的问题，研究了某 MEMS 陀螺仪的随机漂移模型。应用时间序列分 析方法，采用 AR(1)模型对经过预处理的 MEMS 陀螺仪测量数据噪声进行建模，进而基于该 AR 模型并采用状态扩增法设 计 Kalman 滤波算法。速率试验和摇摆试验仿真结果表明在静态和恒定角速率条件下，采用该算法滤波后的 MEMS 陀螺 仪的误差均值和标准差都比滤波前有了明显的降低。针对摇摆基座下该算法随摆动幅度的增大效果变差的问题，从提 高采样率和选择自适应 Kalman 滤波两个方面对算法进行改进。仿真结果表明，两种方法都能改善滤波效果，然而考虑 到系统采样频率和 CPU 计算速度的限制，自适应滤波有更高的实用性。

Springer International Publishing Switzerland 2017 This book consists of 30 chapters. Chapter 1 presents the theory and application of actuation of elastomeric micro-devices via capillary force technology. Chapter 2 provides insight into the fundamental design, working principles, and practical guidance of MEMS accelerometers. Details of experimental setups, signal conditioning, and data processing are also provided to construct an integrated performance assessment system. Chapter 3 gives an overview of the impact of the change from a focus on analysis, simulation, and modeling combined with outsourcing hardware design to the use of digital fabrication tools allowing a cyclic design process inside the lab, using many examples from various projects, and shares some insights and lessons learned for facilitating and implementing this process. Chapter 4 presents the design of a family of micro-robots capable of object manipulation in a fluidic environment. Chapter 5 discusses how state-of-theart mobile technologies may be integrated into human-in-the-loop cyber-physical systems and exploited to provide naturalmappings for remote interactions with such systems. A demonstrative example is used to show how an intuitive metaphor is uncovered for performing a balancing task through the teleoperation of a ball and beam test bed. Chapter 6 provides an overview on force/tactile sensor development. By exploiting optoelectronic technology, two tactile sensors that can be used to execute both fine manipulation of objects and safe interaction tasks with humans are designed and realized. Chapter 7 addresses a brief account of issues related to mechanical properties of MEMS. Micro-testing techniques including microtensile and micro-fatigue testing along with the hardware are described with typical sample type, shape, and geometry, depicted with diagrams and images. Chapter 8 studies a type of marmot-like rescue robot for mine safety detection and rescuing. The kinematics, maximum stiffness, minimum stiffness, and global stiffness of the head section of the rescue robot are modeled and analyzed. Chapter 9 presents a systematic review of key control schemes for reconfigurable robotic systems, highlighting their benefits and disadvantages, and also reviews the application of these systems at microscale. Chapter 10 gives a detailed overview of MEMSbased sensors and actuators. Chapter 11 proposes a novel sensing approach to in situ particulate material (soot) load measurement in a diesel particulate filter using electrical capacitance tomography (ECT). Chapter 12 provides an overview of three actuation mechanisms that are relevant for biomedical applications of microfluidics. The topics dealt with include dielectrophoresis, acoustophoresis, and magnetophoresis. Chapter 13 reviews a few mechatronic devices designed and used in ASD screening and discusses a few devices used for therapeutic purposes. Chapter 14 conducts a critical and thorough review on vapor/gas sensing properties of a wide range of electrochemically derivedmetal oxide nano-forms as the sensing layer employing a different device configuration. Chapter 15 develops a wearable blood pressure monitoring system using ultrasound and a microperfusion system using a metal needle with micro-flow channel for measurement of subepidermal biological substances. Chapter 16 discusses the fabrication strategies and materials for the development of physical, chemical, and biosensors. The emerging applications of flexible electronics in wound healing, wearable electronics, implantable devices, and surgical tools, as well as point-of-care diagnostic devices, are also explored. Chapter 17 presents several MEMS devices where the main application is agriculture. Chapter 18 shows the design, fabrication, and testing of a multifunctional MEMS sensor for use in hydraulic systems. The MEMS device is incorporated into a typical fluid power component. Chapter 19 proposes a piezoelectric-actuated rigid nano-needle for single cell wall (SCW) cutting. A fabricated tungsten (W) nano-needle is assembled with a commercial piezoelectric actuator laterally and perpendicularly. Chapter 20 develops a process planning-driven approach for the development of a robotic percussive riveting system for aircraft assembly automation. Chapter 21 introduces photoinduced fabrication technologies for 3D MEMS devices and examines four technologies and their outcome of applications where fabricated feature sizes decrease and resolution increases. Chapter 22 presents a design principle of the OKES by deriving a mathematical model and characterized the OKES performance in terms of working range, positioning accuracy, resolution, linearity, bandwidth, and control effectiveness with the nano-positioning systems. Chapter 23 presents a lab-on-chip microfluidics system for SCM measurement, related to the force required to drag a single cell and Newton’s law of motion inside microfluidics channel. Chapter 24 focuses on the characteristics of micromanipulation in terms of the types and principles of gripping forces. Chapter 25 discusses three important aspects of inertial microfluidics: fundamental mechanism, microchannel designs, and applications. Chapter 26 provides a detailed overview of the different types of piezoelectric force sensors and the dynamic calibration techniques that have been used to calibrate these sensors. Chapter 27 introduces a magnetically driven micro-robotics system to explain the procedure of developing a magnetic levitation stage and proposes a sensor switching mechanismthat combines magnetic flux measurement-based position determination and optical sensor-based position detection. Chapter 28 applies 3D printing molding methods to fabricate a miniature magnetic actuator for an optical image stabilizer, and the application of robust control techniques to actuate the developed miniature magnetic actuators is discussed. Chapter 29 deals with the concept of biofeedback control systems and its structure, and various applicable control methods which are designed to fulfill different system requirements are provided. Chapter 30 develops an inverse adaptive controller design method for the purpose of mitigating the hysteresis effect in the magnetostrictive-actuated dynamic systems.

基于COMSOL_Multiphysics的MEMS建模及应用

通过三轴加速度传感器ADXL345将采集到的人体运动信息传给STM32微控制器，MCU再对数据进行分析、计算得到运动步伐数,并通过HC-05蓝牙模块将步数传给与其通信的Android手机。